Equipment source: ARIS

Generator with a high nominal power for the excitation of inductively coupled plasma

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Purpose of equipment
The equipment will be used for excitation of inductively coupled plasma. The nominal power of the generator is high, mainly due to the need for high plasma power density in H-mode. At high power densities, the plasma can be maintained at higher pressures (medium vacuum), which consequently means a higher density of reactive particles.
Access of equipment
Responsible for equipment: PhD Rok Zaplotnik
URL: https://www.ijs.si/ijsw/Znotraj%20hi%C5%A1e/Desno?action=AttachFile&do=get&tar get=ARRS_Evidenca_opreme_2021.xlsx
Equipment is usually available Monday through Friday between 8:00 and 14:00. It is necessary to talk about the use beforehand with the head of the Department of Surface Engineering prof. Miran Mozetič.
Research projects (2) Legend
no. Code Title Period Head No. of publications
1.  L2-2617  Innovative method for purification of wastewater  9/1/2020 - 8/31/2024  PhD Gregor Primc  4,359 
2.  L2-1834  Carbon nanowalls for future supercapacitors  7/1/2019 - 6/30/2022  PhD Alenka Vesel  2,916 
ARIS research and infrastructure programmes (1) Legend
no. Code Title Period Head No. of publications
1.  P2-0082  Thin-film structures and plasma surface engineering  1/1/2015 - 12/31/2021  PhD Miran Mozetič  4,958 
Organisations (1)
no. Code Research organisation City Registration number No. of publications
1.  0106  Jožef Stefan Institute  Ljubljana  5051606000  93,831 
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