1.

Measurement Characteristics and Use of Quadrupole Mass Spectrometers for Vacuum Applications (Special section of Journal Vacuum, Volume 101, March 2014)

Janez Šetina was guest editor of a special section of a regular issue of Journal Vacuum where selected papers on the use of quadrupole mass spectrometers in vacuum technology were solicited and published. All together 8 scientific papers from different authors were published.

C.03 Guest-associated editor

2.

Ultimate limits in the gas composition determination within small sealed volumes by quadrupole mass spectrometry

At international symposium, organized by American Vacuum Society, a new approach on determination of gas composition of extremely small amount of gas mixture by quadruple mass spectrometer was presented.

B.04 Guest lecture

COBISS.SI-ID: 28363303

3.

Referenzausgasungsprobe und Verfahren zum Kalibrieren einer Ausgasungsmessvorrichtung

Patent application was filed at European patent office. Application describes and protects construction of outgassing reference samples which are constructed from permeation element based on elastomeric material and suitable hermetically sealed reservoir. When reservoir is filled with a selected gas or liquid, this penetrates into the elastomeric material and disolves in it. Vhen such sample is placed in the vacuum system the dissolved gas starts to evolve into vacuum with a known value of gas flow rate which simulates outgassing rate of selected gas. Refere sample can be measured by the primary outgassing measurement system, yielding a certified reference value of the outgasing rate. After that the sample can be sent to a user in industry or another laboratory for the measurement in their system. By comparing their results with the certified reference value the industrial outgassing rate measurement facilities can be calibrated or validated. Certified reference samples can be also used in a round robin test for the proficiency testing of systems in different laboratories.

F.32 International patent

COBISS.SI-ID: 1115562

4.

Vacuum measures up for industry

In August 2014 a special issue of journal Physics World with a topical Focus on Vacuum technology was issued. The special issue was entirely devoted to the new achievements in vacuum technology. In this special issue we have published an article where we presented to the world vacuum comunity activities and achievements of the EMRP IND12 project. In this project IMT was leading one of three workpackages: WP 3- Partial pressure and outgassing rate measurement.

B.06 Other

COBISS.SI-ID: 1115050

5.

Dispositivo per la calibrazione di apparati usati per misure di outgassing e metodo per la calibrazione in situ di apparati usati per misure di outgassing

Patent application was filed at Italian patent office. Application describes and protects construction of outgassing reference device which is based on a thin SiN membrane with the nanoholes drilled by focused ion beam (FIB) technique. Dimensions of nanoholes are tailored to have appropriate gas conductance. The membrane is attached to a small gas reservoir. After filling the reservoir with a gas or gas mixture it is permanently sealed. The gas flow through nanoholes can be used to simulate outgassing. Device was constructed to be small and compact so it accommodates into usual outgassing rate measurement system. It’s outgasing rate can be also certified by a primary system. Realization of this device was done by collaboration of IMT, University in Genova and INRIM from Torino.