L2-4062 — Annual report 2011
1.
Design study for a capacitive ceramic pressure sensor

The LTCC technology has been used for realisation of pressure sensors. We have studied different configuration of sensors and performance of pressure sensor at different environments conditions.

COBISS.SI-ID: 24956967
2.
LTCC-based capacitive pressure sensor in a harsh environment

The LTCC technology has been used for realisation of pressure sensors. We have studied different configuration of sensors and performance of pressure sensor at different environments conditions.

COBISS.SI-ID: 25060391
3.
Thick film temperature sensors for LTCC structures

Temperature sensors in the micro-chemical reactors are very important for monitoring chemical reaction or regulation of heaters. We were fabricated and characterised thick film temperature sensor in the LTCC structure.

COBISS.SI-ID: 25201703