In this contribution the optimization of the scanning electron microscopy methods and electron-probe EDS microanalysis for the characterization of Fe-Pd-based thin films was presented. The analyses of the surface morphology of nanostructured Fe-Pd films and their thicknesses were performed by using the high-resolution FEGSEM imaging. Chemical composition of thin films was determined by two independent analytical approaches: (i) using low-voltage EDS analysis of low-energy Fe-L and Pd-L X-ray spectral lines and (ii) using the method of conventional microanalysis with variable voltage approach and off-line quantitative data processing with dedicated thin film analysis software. The quantitative results confirmed the consistency of both EDS approaches. It was shown that low-voltage EDS analysis is faster method being especially suitable and accurate enough to achieve reliable elemental analyses of the FePd ultrathin films with thickness ) 80 nm.
COBISS.SI-ID: 25021735
In this work we report on the assessment of quality of copper sulfide (CuS)-based thin films with different thicknesses which have been prepared by thermal co-evaporation of the elemental constituents. Among other characterization methods here we gave our contribution and have focused on advanced scanning electron microscopy and atomic force microscopy, which were applied as complementary methods for the analysis and determination of morphological and microstructural properties of CuS thin films.
COBISS.SI-ID: 25179431