A review of recent research activities in LMSE on micro/nano technologies and structures with emphasis on silicon machining for microreactors realization, for applications in electronics, medicine and chemistry was given. Latest results were reported and discussed. Possible topics for cooperation were identified.
F.18 Transfer of new know-how to direct users (seminars, fora, conferences)
COBISS.SI-ID: 7561300Recent research activities on micro/nano technologies and structures with emphasis on silicon micromachining in LMSE were reviewed. Latest results were reported and discussed. Possible topics for cooperation were identified.
B.04 Guest lecture
COBISS.SI-ID: 7562324Research activities in LMSE on micro/nano structures and related (micro)electronic circuits, involved in microstructures applications, were reviewed. Latest results were reported and discussed. Possible topics for cooperation were identified.
B.04 Guest lecture
COBISS.SI-ID: 7189588Recent research activities on micro/nano technologies and structures in LMSE, for microsensors and microactuators realization, with emphasis on silicon micromachining were reviewed. Latest results were reported and discussed. Possible topics for cooperation were identified.
F.18 Transfer of new know-how to direct users (seminars, fora, conferences)
COBISS.SI-ID: 7561556MEMS systems represent attractive set of technologies for development of miniaturized devices. One of the prominent field is microfluidics. In this work the micropump as a part of microfluidic system is presented. The main focus is directed toward the reciprocating micropump with passive rectifying channels, called nozzle/diffuser valve actuated by piezoelectric disc plate. Micropump design is closely related to numerical simulation, thus popular finite element method is presented.
F.02 Acquisition of new scientific knowledge
COBISS.SI-ID: 7083092