Thin films of potassium sodium niobate (K0.5Na0.5)NbO3 on Pt(111)/TiO2/SiO2/Si substrates have been prepared by chemical solution deposition. The stoichiometric sols were synthesized from corresponding alkali metal ethoxides or acetates and niobium ethoxide in 2-methoxyethanol. The thin film quality is affected by choice of alkali metal precursors. Thin films prepared from the acetate-based sol upon heating to 670?C crystallize in pure perovskite phase. The dielectric permittivity of the 350 nm thick KNN film at 1 kHz is 570 and the dielectric loss factor is 0.07.
COBISS.SI-ID: 22155559