The work encompasses a broad field of understanding thin metallic layers based on tungsten. We studied the interaction of laser pulses with the film surface and analyzed the failures. We found three types of failures: ablation, modification and morphology change. We determined the thresholds for the appearance of these failures.
COBISS.SI-ID: 21668391
The research is focussed on better understanding of growth mechanisms during sputtering of coatings based on TiAlN and CrN. In contrast to a widespread opinion that the CrN layer is homogeneous, we found out that within the layer, both chemical composition and crystal structure varies. The effect was explained by a complex rotation of substrates in the sputtering apparatus.
COBISS.SI-ID: 22190375