Silicon pressure sensors technologies

Investigations of critical effects that are limiting the important parameters of piezoresistive pressure sensors are proposed. These crucial parameters are offset voltage, linearity of sensor response, longterm stability and others. On the basis of results from the investigations of thin film intrinsic mechanical stresses, long term stability behaviour and new etching approaches in the field of micromachining technology of silicon it is expected that improved design and fabrication of low pressure sensors prototypes will result. Investigations of possible limitations in the miniaturization of already developed piezoresistive sensors for new demanding applications arising now on the market, will be undertaken. In the proposed activities, also work in the field of data acquisition and output signal conditioning, based on microcontroller supported electronic circuits will be performed, enabling mastering smart sensor technology. Realised system will find application in the production of biomedical sensors and similar. Results of the proposed R&D activities will support the Slovenian industry in its endeavours to remain in the hightec field on the demanding world market.