Projects / Programmes
Uporabne tehnologije silicijevih senzorjev tlaka (Slovene)
Code |
Science |
Field |
Subfield |
2.09.02 |
Engineering sciences and technologies |
Electronic components and technologies |
Electronic components |
Code |
Science |
Field |
T170 |
Technological sciences |
Electronics |
micromachining, silicon piezoresistive pressure sensors
Organisations (3)
, Researchers (9)
1538 University of Ljubljana, Faculty of Electrical Engineering
no. |
Code |
Name and surname |
Research area |
Role |
Period |
No. of publicationsNo. of publications |
1. |
11682 |
MSc Uroš Aljančič |
Electronic components and technologies |
Researcher |
1998 - 2001 |
206 |
2. |
01926 |
PhD Slavko Amon |
Electronic components and technologies |
Head |
1998 - 2001 |
473 |
3. |
17125 |
Matjaž Cvar |
|
Researcher |
1998 - 2001 |
8 |
4. |
05075 |
PhD Drago Resnik |
Electronic components and technologies |
Researcher |
1998 - 2001 |
261 |
5. |
04383 |
PhD Danilo Vrtačnik |
Electronic components and technologies |
Researcher |
1998 - 2001 |
315 |
0806 HIPOT Ltd Electronic Elements and Systems
1704 HIPOT-R&D Research and development in Technologies and Systems
no. |
Code |
Name and surname |
Research area |
Role |
Period |
No. of publicationsNo. of publications |
1. |
08346 |
Darko Belavič |
Electronic components and technologies |
Researcher |
1999 - 2001 |
684 |
2. |
19391 |
Mitja Jerlah |
|
Researcher |
1998 - 2001 |
115 |
3. |
17802 |
Ivan Lahne |
Electronic components and technologies |
Researcher |
1999 - 2001 |
4 |
4. |
05633 |
Stojan Šoba |
Metrology |
Researcher |
1999 - 2001 |
33 |
Abstract
Research and study of mechnisms in the field of sensors and related technologies, based on previous experiences, with emphasys on silicon piezoresistive pressure sensors, will result in better insight into micromachining technologies and material properties of these devices. Improved knowledge of the field will enable new approaches in the design and fabrication of sensor structures. The proposed applicative research will also be used as the basis of the future developement work in Slovenia in the sensor field. Prototype chips of silicon pressure sensors will be designed and fabricated as a result of this work, supporting the slovenian industry in its endeavours to remain in hightec.