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Equipment source: ARIS

XPS spectrometer for analysis of surfaces and thin films

Purpose of equipment
The XPS spectrometer enables the analysis of the chemical composition of surfaces and thin films and provides information on the oxidation states of elements and the type of chemical bond, the depth distribution of elements in very thin layers... It is equipped with X-ray source from Al-anode, UPS source, an ion gun for Ar ions and Ar clusters. The diameter of the X-ray beam is 5 micrometers.
Access of equipment
Responsible for equipment: PhD Janez Kovač
Application for external users is possible, contact person prof. dr. Janez Kovač (janez.kovac@ijs.si, phone: 01 477 3403)
ARIS research and infrastructure programmes (1) Legend
no. Code Title Period Head No. of publicationsNo. of publications
1.  P2-0082  Thin-film structures and plasma surface engineering  1/1/2022 - 12/31/2027  PhD Miran Mozetič  3,737 
Organisations (1)
no. Code Research organisation City Registration number No. of publicationsNo. of publications
1.  0106  Jožef Stefan Institute  Ljubljana  5051606000  93,831 
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