State-of-the-art FIB (Focused Ion Beam)

The state-of-the-art FIB (Focused Ion Beam) system combines a scanning electron microscope (SEM) with an ion beam and is primarily used for the preparation of thin lamellae for transmission electron microscopy (TEM) analysis or for nanolithography techniques. For the preparation of thin lamellae, the use of various gases is required to form protective films on the surface of the samples, along with mechanical manipulators to attach the prepared thin lamellae to holders for TEM analysis. Additionally, the FIB is equipped with an ESD system for chemical analysis of examined samples.

Responsible for equipment: PhD Miran Čeh
The equipment can be used by all qualified IJS operators (including external ones) who have successfully completed the training process organized by the Centre for Electron Microscopy and Microanalysis (CEMM). Licensed operators access the FIB based on reservations made through the on-line reservation system. Since the FIB is part of the CEMM infrastructure centre and operates within the IJS infrastructure program, the usage slots for operators depend on the nature of their research work and internal co-financing of research equipment.