ProtoLaser LDI

The ProtoLaser LDI is an universal, high-resolution, table top laser direct imaging (LDI) system for prototyping on resist-covered substrates. A transferred image has even better defined edges compared to conventional lithography. With a working area of up to 100 x 100 mm and structures down to 1 μm it is an ideal tool for microfluidic designs. Using 100 kHz beam positioning by acousto-optic deflectors, extremely fast writing is possible. Illumination of a typical microfluidic circuit only takes a few minutes. Automated measurements compensate for unevenness of the substrate and applied resists.

Responsible for equipment: Damjan Svetin
URL: www.nanocenter.si
first access upon agreement with responsible person, experienced operators through reservation system