Loading...
Equipment
Clean room for micro and nanolithography technologies and analytical equipment
Purpose of equipment
The research equipment for clean production line and measurement system for micro and nanolithography by improving the final resolution of nanolithography. It is a system of dry-box chambers, an evaporator and a system for maintaining the conditions of a clean room.
Access of equipment
Responsible for equipment:
PhD Dragan D. Mihailović
URL: https://www.ijs.si/ijsw/Znotraj%20hi%C5%A1e/Desno?action=AttachFile&do=get&tar get=ARRS_Evidenca_opreme_2021.xlsx
Equipment is available on demand. Training can be arranged. The price of services depends on complexity of the measurements. Contact damjan.svetin@ijs.si
URL: https://www.ijs.si/ijsw/Znotraj%20hi%C5%A1e/Desno?action=AttachFile&do=get&tar get=ARRS_Evidenca_opreme_2021.xlsx
Equipment is available on demand. Training can be arranged. The price of services depends on complexity of the measurements. Contact damjan.svetin@ijs.si
ARIS research and infrastructure programmes (1) Legend
| no. | Code | Title | Period | Head | No. of publicationsNo. of publications |
|---|---|---|---|---|---|
| 1. | P1-0040 | 1/1/2015 - 12/31/2021 | 2,300 |
Organisations (1)
| no. | Code | Research organisation | City | Registration number | No. of publicationsNo. of publications |
|---|---|---|---|---|---|
| 1. | 0106 | Ljubljana | 5051606000 | 93,831 |