Equipment

Upgrade of stylus profilometer

Purpose of equipment

Study of substrate topography before and after deposition. Thin film thickness measurement.

Access of equipment

Responsible for equipment: PhD Peter Panjan
URL: https://www.ijs.si/ijsw/Znotraj%20hi%C5%A1e/Desno?action=AttachFile&do=get&tar get=ARRS_Evidenca_opreme_2021.xlsx
only operator cost is charged (28,2 €/h)

Research projects (3) Legend

no.	Code	Title	Period	Head	No. of publicationsNo. of publications
1.	L2-2100	Razvoj nove generacije trdih prevlek s pulznim naprševanjem (Slovene)	5/1/2009 - 4/30/2012	PhD Peter Panjan	5,193
2.	L2-0858	Študij plazemskih parametrov pri kondicioniranju notranjih površin fuzijskega reaktorja (Slovene)	2/1/2008 - 1/31/2011	PhD Tomaž Gyergyek	3,812
3.	L2-9189	PVD coatings as an alternative for corrosion protection of Fe and Al alloys	7/1/2007 - 6/30/2010	PhD Darinka Kek Merl	2,357

ARIS research and infrastructure programmes (1) Legend

no.	Code	Title	Period	Head	No. of publicationsNo. of publications
1.	P2-0082	TankThin-film structures and plasma surface engineering	1/1/2004 - 12/31/2008	PhD Anton Zalar	4,480

Organisations (1)

no.	Code	Research organisation	City	Registration number	No. of publicationsNo. of publications
1.	0106	Jožef Stefan Institute	Ljubljana	5051606000	93,831