Equipment

Laboratory sputtering equipment

Purpose of equipment

Sputtering of metal electrodes on different materials. Option sputtering up to three different metal layers in a single cycle.

Access of equipment

Responsible for equipment: PhD Barbara Malič
URL: https://www.ijs.si/ijsw/Znotraj%20hi%C5%A1e/Desno?action=AttachFile&do=get&tar get=ARRS_Evidenca_opreme_2021.xlsx
Sputtering of metallic electrode on different materials(Au, Pt, Ag, Ti, Cr, Cu, alloys etc.). Price and availabillity by arragement.

Research projects (3) Legend

no.	Code	Title	Period	Head	No. of publicationsNo. of publications
1.	L2-1187	Procesiranje keramičnih mikroelektromehanskih sistemov s pomočjo novih tehnologij (Slovene)	2/1/2008 - 1/31/2011	PhD Janez Holc	4,911
2.	J2-1227	Odvisnost funkcijskih lastnosti tankih plasti na osnovi okolju prijaznih perovskitov od mikrostrukture in kemijskih homogenosti (Slovene)	2/1/2008 - 1/30/2011	PhD Barbara Malič	3,305
3.	J2-9090	Materiali in postopki za izdelavo miniaturnih debeloplastnih keramičnih 2D in 3D struktur (Slovene)	1/1/2007 - 12/31/2009	PhD Marko Hrovat	3,277

ARIS research and infrastructure programmes (1) Legend

no.	Code	Title	Period	Head	No. of publicationsNo. of publications
1.	P2-0105	Electronic ceramics, nano, 2D and 3D structures	1/1/2004 - 12/31/2008	PhD Marija Kosec	4,437

Organisations (1)

no.	Code	Research organisation	City	Registration number	No. of publicationsNo. of publications
1.	0106	Jožef Stefan Institute	Ljubljana	5051606000	93,831